Clean Room Humidity Range

Relative humidity in a semiconductor cleanroom is typically controlled to a target value somewhere within the 30 to 50 percent range and with tolerances as narrow as 1 percent for some areas such as photolithography or even less for deep ultraviolet processing duv and relaxing to. When cleanroom cleaning staff or technicians shiver or even sweat they release a higher amount of particles into your cleanroom. This means that in most facilities the cleanrooms air handling units ahu consume over 60 of all the site power.

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The air inside is constantly recirculated through high efficiency particulate air hepa filters.

Clean room humidity range.

Like humidity levels it s important to maintain a standard temperature in cleanrooms to keep employees comfortable. Humidity in clean rooms clean rooms in general. Humidity in clean rooms clean rooms in general a clean room is a manufactur ing environment that has a low level of environmental poll utants such as dust airborn e microbes aerosol particles cand chemical vapors. Some clean rooms ar e entire.

As an example humidity is relative it s relative to the temperature it s at. If you were to set your temperature at 70 degrees and 50 relative humidity at 68 degrees that would be 55 relative humidity. Relative humidity is one of the environmental conditions usually specified for cleanroom operations. A clean room is a manufacturing environment that has a low level of environmental pollutants such as dust airborne microbes aerosol particles and chemical vapors.

The reason why their comfort matters is even more interesting. Clean rooms need a lot of air and usually at a controlled temperature and humidity. That translates again into the cost of construction and the cost of operating your clean room. The air inside is constantly recir culated through high effici ency par ticulate air hepa efilters.

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